Qualitative analysis and deadlock prevention of a real-world IC wafer fabrication system.

MuDer Jeng Xiaolan Xie

Published in: SMC (1998)

Keyphrases

qualitative analysis
real world
quantitative analysis
wafer fabrication
content analysis
data sets
fault tree
wide range
real life
synthetic data
case study
data mining
lower bound
image analysis
control system
reinforcement learning
similarity measure
integrated circuit
three dimensional