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Fabricating 90 nm Resolution Structures in Sol-Gel Silica Optical Waveguides for Biosensor Applications.

Yasufumi Enami
Published in: J. Sensors (2017)
Keyphrases
  • waveguide
  • learning algorithm
  • low resolution
  • integrated circuit
  • complex structures
  • fiber optic
  • electron beam lithography
  • electro optic