A novel ontology-based knowledge engineering approach for yield symptom identification in semiconductor manufacturing.
Fang-Hsiang SuShi-Chung ChangChih-Min FanYa-Jung TsaiJ. JhengChing-Pin KaoChun-Yao LuPublished in: CASE (2009)
Keyphrases
- knowledge engineering
- semiconductor manufacturing
- expert systems
- knowledge acquisition
- knowledge representation
- discrete event simulation
- knowledge elicitation
- process control
- knowledge management
- rule based expert systems
- domain knowledge
- case based reasoning
- knowledge based systems
- software engineering
- artificial intelligence
- mixed initiative
- expert knowledge
- database
- neural network
- information systems
- production system
- fault diagnosis
- reasoning under uncertainty
- semantic web technologies
- related fields
- learning algorithm
- information technology
- databases
- domain specific