A Novel Defect Classification Scheme Based on Convolutional Autoencoder with Skip Connection in Semiconductor Manufacturing.
Jaegyeong ChaJuyong ParkJongpil JeongPublished in: ICACT (2022)
Keyphrases
- classification scheme
- semiconductor manufacturing
- restricted boltzmann machine
- classification schemes
- discrete event simulation
- process control
- deep learning
- production system
- sparse coding
- music genre classification
- defect detection
- classification method
- convolutional neural networks
- databases
- conditional random fields
- network architecture
- graphical models
- data analysis
- probabilistic graphical models
- training data
- similarity measure
- clustering algorithm
- image processing
- knowledge base
- information retrieval
- data sets