Design and Modeling of a MEMS Dual-Backplate Capacitive Microphone with Spring-Supported Diaphragm for Mobile Device Applications.
Néstor N. Peña-GarcíaLuz Antonio Aguilera-CortésMax A. González-PalaciosJean-Pierre RaskinAgustín Leobardo Herrera-MayPublished in: Sensors (2018)