Demonstration of integrated micro-electro-mechanical switch circuits for VLSI applications.
Fred ChenMatthew SpencerRhesa NathanaelChengcheng WangHossein FariborziAbhinav GuptaHei KamVincent PottJaeseok JeonTsu-Jae King LiuDejan MarkovicVladimir StojanovicElad AlonPublished in: ISSCC (2010)