Temperature Compensation for MOEMS Micromirror with Piezoresistive Angle Sensor.

Lei Qian Huijun Yu Jie Hu Wenjiang Shen

Published in: NEMS (2021)

Keyphrases

heat flow
ultrasonic flow measurement
laser beam
sensor networks
sensor data
real time
back propagation neural network
fiber bragg grating
database
neural network
multi sensor
sensor fusion
data sets
decision trees
image sequences
high sensitivity