Controllable-Domain-Based Fuzzy Rule Extraction for Copper Removal Process Control.
Bin ZhangChunhua YangHongqiu ZhuPeng ShiWeihua GuiPublished in: IEEE Trans. Fuzzy Syst. (2018)
Keyphrases
- rule extraction
- process control
- fuzzy rules
- rough fuzzy sets
- neural network
- black box
- rough sets
- linguistic rules
- control system
- manufacturing process
- fuzzy sets
- rough fuzzy
- classification rules
- rough set theory
- fuzzy logic
- association rules
- decision rules
- knowledge reduction
- product quality
- rule induction
- feature selection
- rule sets
- pattern recognition
- membership functions
- data sets
- artificial intelligence
- control charts
- semiconductor manufacturing