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Vertical Electrostatic MEMS Aligner with Integrated Silicon Nitride Optical Waveguides.
Seyedfakhreddin Nabavi
Michaël Ménard
Frederic Nabki
Published in:
IEEE SENSORS (2022)
Keyphrases
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waveguide
integrating multiple
databases
solid state
data sets
machine learning
electric field
atmospheric turbulence
silicon dioxide
electro optic