Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers - CMUT and PMUT.
Haleh NazemiJenitha Antony BalasingamSiddharth SwaminathanKenson AmbroseMuhammad Umair NathaniTara AhmadiYameema Babu LopezArezoo EmadiPublished in: Sensors (2020)