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A literature review on modeling and control design for electrostatic microactuators with fringing and squeezed film damping effects.
Marialena Vagia
Anthony Tzes
Published in:
ACC (2010)
Keyphrases
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literature review
case study
optimal design
design science
control system
control strategy
modeling language
design procedure
knowledge management
design process
electronic commerce
control method
design decisions
requirements engineering
open loop
information systems development