Heterogeneously Integrated Mach-Zehnder Modulator Using Membrane InGaAsP Phase Shifter and Hydrogen-Free SiN Waveguide on Si Platform.
Tatsurou HirakiTakuma AiharaTakuro FujiiKoji TakedaTai TsuchizawaTakaaki KakitsukaHiroshi FukudaShinji MatsuoPublished in: ECOC (2018)