Unsupervised spatial pattern classification of electrical-wafer-sorting maps in semiconductor manufacturing.
Federico Di PalmaGiuseppe De NicolaoGuido MiragliaEgidio PasquinettiFrancesco PiccininiPublished in: Pattern Recognit. Lett. (2005)
Keyphrases
- semiconductor manufacturing
- pattern classification
- discrete event simulation
- process control
- spatial analysis
- feature extraction
- production system
- pattern recognition
- nearest neighbor rule
- unsupervised learning
- supervised learning
- fuzzy classifier
- vowel recognition
- spatial data
- parzen window
- pattern classification problems
- probabilistic neural network
- linear dimensionality reduction
- semi supervised
- artificial neural networks
- machine learning
- discriminant embedding