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Wafer-Level Hybrid Integration of Complex Micro-Optical Modules.
Peter Dannberg
Frank Wippermann
Andreas Brückner
Andre Matthes
Peter Schreiber
Andreas Bräuer
Published in:
Micromachines (2014)
Keyphrases
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higher level
building blocks
complex data
real world
data sets
coarse grained
complex systems
modular design
physical characteristics
modular structure
semiconductor manufacturing
complex environments
lower level
information integration
control system
high resolution
data model
e learning
machine learning
databases