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Profile Measurement of Polished Surface with Respect to a Lattice Plane of a Silicon Crystal Using a Self-Referenced Lattice Comparator.

Hiroyuki FujimotoAtsushi WasedaXiao-Wei Zhang
Published in: Int. J. Autom. Technol. (2011)
Keyphrases
  • three dimensional
  • lattice structure
  • normal vectors
  • high speed
  • concept lattice
  • surface reconstruction
  • medical images
  • thin film
  • si sio