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Profile Measurement of Polished Surface with Respect to a Lattice Plane of a Silicon Crystal Using a Self-Referenced Lattice Comparator.
Hiroyuki Fujimoto
Atsushi Waseda
Xiao-Wei Zhang
Published in:
Int. J. Autom. Technol. (2011)
Keyphrases
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three dimensional
lattice structure
normal vectors
high speed
concept lattice
surface reconstruction
medical images
thin film
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