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Adaptive Scheduling of Cluster Tools With Wafer Delay Constraints and Process Time Variation.

Yuchul LimTae-Sun YuTae-Eog Lee
Published in: IEEE Trans Autom. Sci. Eng. (2020)
Keyphrases
  • resource constraints
  • constraint satisfaction
  • manufacturing process
  • neural network
  • clustering algorithm
  • relational databases
  • end users
  • scheduling problem
  • decision support