Ga contamination in silicon by Focused Ion Beam milling: Dynamic model simulation and Atom Probe Tomography experiment.
Jin HuangMarkus LöfflerW. MoellerEhrenfried ZschechPublished in: Microelectron. Reliab. (2016)
Keyphrases
- dynamic model
- experimental data
- high speed
- genetic algorithm ga
- genetic algorithm
- control scheme
- fitness function
- artificial neural networks
- parallel manipulator
- multiple models
- image reconstruction
- mathematical model
- evolutionary algorithm
- unscented kalman filter
- soft computing
- particle swarm optimization
- controller design
- robot manipulators
- tomographic reconstruction
- liquid crystal
- shear stress
- reduced order model