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Multi-functional Monolithic-MEMS Tactile Imager Using Flexible Deformation of Silicon IC.

Hidekuni TakaoMasaki YawataRyo KodamaKazuaki SawadaMakoto Ishida
Published in: CICC (2007)
Keyphrases
  • image registration
  • low cost
  • high speed
  • infrared
  • integrated circuit
  • genetic algorithm
  • three dimensional
  • lightweight
  • high density
  • real time
  • power consumption