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Automated CAD/CAM-based nanolithography using a custom atomic force microscope.
Matthew S. Johannes
Jonathan F. Kuniholm
Daniel G. Cole
Robert L. Clark
Published in:
IEEE Trans Autom. Sci. Eng. (2006)
Keyphrases
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cad cam
application specific
computer aided design
object oriented
domain specific
database
computer aided
data manipulation
complex objects
data model
general purpose
data collection
transaction model