An efficient algorithm for stencil planning and optimization in E-beam lithography.
Jiabei GeChanghao YanHai ZhouDian ZhouXuan ZengPublished in: ASP-DAC (2017)
Keyphrases
- optimization algorithm
- preprocessing
- k means
- dynamic programming
- stochastic gradient
- optimization method
- learning algorithm
- recognition algorithm
- theoretical analysis
- worst case
- experimental evaluation
- computational complexity
- objective function
- multi objective
- significant improvement
- cost function
- evolutionary algorithm
- search space
- detection algorithm
- improved algorithm
- neural network
- evolution strategy
- optimization process
- highly efficient
- bayesian networks
- matching algorithm
- clustering method
- particle swarm optimization
- computational cost