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Rigorous three-dimensional photoresist exposure and development simulation over nonplanar topography.
Heinrich Kirchauer
Siegfried Selberherr
Published in:
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (1997)
Keyphrases
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three dimensional
case study
development environment
decision support
information processing
virtual reality
artificial intelligence
multi agent
expert systems
control system
software engineering
multi view
knowledge based systems
range images
simulation environment
multi agent based simulation