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Robust production capacity planning under uncertain wafer lots transfer probabilities for semiconductor automated material handling systems.
Wenliang Chen
Zheng Wang
Felix T. S. Chan
Published in:
Eur. J. Oper. Res. (2017)
Keyphrases
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semiconductor manufacturing
capacity planning
material handling
production line
production system
manufacturing process
process control
capacity expansion
decision making
computer systems
complex systems
stochastic programming
shop floor
artificial intelligence