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3D FEM Analysis of High-Frequency AlN-Based PMUT Arrays on Cavity SOI.

Wenjuan LiuLeming HeXubo WangJia ZhouWeijiang XuNikolay SmaginMalika ToubalHao YuYuandong GuJinghui XuDenis RemiensJunyan Ren
Published in: Sensors (2019)
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