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Effective work-function control technique applicable to p-type FinFET high-k/metal gate devices.

Shimpei YamaguchiZeynel BayindirXiaoli HeSuresh UppalPurushothaman SrinivasanChloe YongDongil ChoiManoj JoshiHyuck Soo YangOwen HuSrikanth SamavedamDong Kyun Sohn
Published in: Microelectron. Reliab. (2017)
Keyphrases
  • wide range
  • control system
  • multi agent
  • mobile devices
  • databases
  • information retrieval
  • multimedia
  • high quality
  • control method
  • process control