A novel approach for wafer defect pattern classification based on topological data analysis.
Seungchan KoDowan KooPublished in: Expert Syst. Appl. (2023)
Keyphrases
- pattern classification
- data analysis
- feature extraction
- pattern recognition
- nearest neighbor rule
- data mining
- vowel recognition
- integrated circuit
- fuzzy classifier
- machine learning
- pattern classification problems
- parzen window
- decision boundary
- computer vision
- rough sets
- human identification
- cluster analysis
- semiconductor manufacturing
- mass spectrometry data
- image segmentation
- feature selection
- radial basis function neural network
- multiscale
- probabilistic neural network
- fuzzy logic