TiN-C Based CMOS MEMS Pirani Gauge for on-Chip Pressure Measurement.
Manu GargFang Wei TsaiKhanjan JoshiYi ChiuPushpapraj SinghPublished in: SENSORS (2023)
Keyphrases
- analog vlsi
- high speed
- circuit design
- low cost
- cmos image sensor
- analog to digital converter
- single chip
- cmos technology
- image sensor
- chip design
- low power
- random access memory
- data acquisition
- power dissipation
- printed circuit boards
- mixed signal
- nm technology
- power consumption
- focal plane
- high density
- hardware and software
- metal oxide semiconductor
- ultra low power
- data sets
- host computer
- rolling shutter
- low voltage
- solid state
- imaging systems
- video sequences