A Closed-Loop ΣΔ Interface for a High-Q Micromechanical Capacitive Accelerometer With 200 ng/√Hz Input Noise Density.
Honglin XuXiaowei LiuLiang YinPublished in: IEEE J. Solid State Circuits (2015)
Keyphrases
- closed loop
- open loop
- control system
- control law
- feedback control
- control scheme
- parameter identification
- force control
- pid controller
- asymptotic stability
- gaussian noise
- fuzzy logic
- tracking error
- control loop
- feedback controller
- robot manipulators
- objective function
- trajectory tracking
- guaranteed cost
- reference trajectory