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A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries.

Ming LuoHeng-Chao YanBin HuJunhong ZhouChee Khiang Pang
Published in: Comput. Ind. Eng. (2015)
Keyphrases
  • data driven
  • theoretical framework
  • databases
  • prediction accuracy
  • framework enables
  • data sets
  • genetic algorithm
  • search engine
  • metadata
  • multiscale
  • control system