Resonance Frequency and Vibration Mode Modification of Piezoelectric MEMS Ultrasonic Sensors on Buckled Diaphragm Structures for High Sensitivity and High Resolution Measurement.
Kaoru YamashitaJunpei YamamotoZhengxin YiPublished in: SENSORS (2023)
Keyphrases
- high sensitivity
- fiber bragg grating
- high resolution
- low resolution
- super resolution
- imaging sensors
- optical fiber
- data acquisition
- sensor data
- high quality
- image processing
- magnetic resonance images
- sensor networks
- remote sensing
- high frequency
- dynamic characteristics
- sonar images
- real time
- fault diagnosis
- low frequency
- higher resolution
- wireless sensor networks
- expert systems
- three dimensional