A Generalized Semiconductor Wafer Defect Classifier.
Priyanshu Kumar RaiPratik PalAkshay AgarwalPublished in: Tiny Papers @ ICLR (2024)
Keyphrases
- semiconductor manufacturing
- wafer fabrication
- training data
- decision trees
- classification scheme
- training set
- feature selection
- feature set
- bayes rule
- training samples
- support vector
- support vector machine
- learning algorithm
- classifier systems
- feature space
- integrated circuit
- process control
- learning phase
- decision tree classifiers
- knn
- classification rate
- learning classifier systems
- classification process
- production line
- classifier combination
- defect detection
- training examples
- feature vectors