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Control configuration selection and distributed nonlinear control of surface roughness in a sputtering process.

Yiming LouGangshi HuPanagiotis D. Christofides
Published in: CDC (2007)
Keyphrases
  • process control
  • control strategy
  • control system
  • color images
  • fuzzy sets
  • human faces
  • discrete event
  • product quality
  • manufacturing process