A Nondestructive Method for Accurately Extracting Substrate Parameters of Arbitrary Doping Profile in Nanoscale VLSI.
Yiorgos I. BontziosMichael G. DimopoulosAlkis A. HatzopoulosPublished in: IEEE Trans. Instrum. Meas. (2011)
Keyphrases
- experimental evaluation
- cost function
- sensitivity analysis
- parameter estimation
- high precision
- similarity measure
- multiscale
- input data
- synthetic data
- segmentation method
- parameter selection
- data sets
- transfer function
- maximum likelihood estimation
- linear model
- parameter settings
- classification method
- detection method
- edge detection
- least squares
- support vector machine
- significant improvement
- preprocessing
- feature selection