Machine learning plasma-surface interface for coupling sputtering and gas-phase transport simulations.
Florian KrügerTobias GergsJan TrieschmannPublished in: CoRR (2018)
Keyphrases
- machine learning
- scanning electron microscope
- genetic algorithm
- information extraction
- magnetic field
- pattern recognition
- machine learning algorithms
- data mining
- decision trees
- user interface
- artificial intelligence
- surface reconstruction
- surface model
- physical models
- machine learning approaches
- numerical simulations
- user friendly
- machine learning methods
- learning algorithm
- knowledge acquisition
- text mining
- natural language
- learning phase
- three dimensional
- feature selection
- computer vision
- medical images
- supervised learning
- knowledge representation
- training phase
- explanation based learning
- free form
- normal vectors