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Carbon as a MEMS material: micro and nanofabrication of pyrolysed photoresist carbon.

Chunlei WangRabih ZaoukBenjamin Y. ParkMarc J. Madou
Published in: Int. J. Manuf. Technol. Manag. (2008)
Keyphrases
  • carbon dioxide
  • knowledge base
  • image processing
  • wide range
  • data sets
  • neural network
  • information retrieval
  • decision trees
  • multiscale
  • multi agent systems
  • special case