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Benjamin Y. Park
Publication Activity (10 Years)
Years Active: 2008-2008
Publications (10 Years): 0
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Publications
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Chunlei Wang
,
Rabih Zaouk
,
Benjamin Y. Park
,
Marc J. Madou
Carbon as a MEMS material: micro and nanofabrication of pyrolysed photoresist carbon.
Int. J. Manuf. Technol. Manag.
13 (2/3/4) (2008)