Rule-based data mining for yield improvement in semiconductor manufacturing.
Sholom M. WeissRobert J. BasemanFateh TipuChristopher N. CollinsWilliam A. DaviesRaminderpal SinghJohn W. HopkinsPublished in: Appl. Intell. (2010)
Keyphrases
- semiconductor manufacturing
- data mining
- discrete event simulation
- process control
- knowledge discovery
- machine learning
- data mining algorithms
- expert systems
- data mining techniques
- cluster analysis
- production system
- data driven
- data mining applications
- data warehouse
- rough sets
- significant improvement
- association rules
- data mining tools
- data mining methods
- web intelligence
- business applications
- knowledge base
- data warehousing
- pattern mining
- computer science
- rule base
- text mining
- data visualization
- fuzzy logic
- data analysis
- data mining tasks
- knowledge discovery in databases
- rule based systems
- clustering algorithm
- privacy preserving data mining
- information retrieval
- neural network