A general tool-based multi-product model for high-mixed production in semiconductor manufacturing.
Liang ChenLiuxing ChuCuicui GeYueyuan ZhangPublished in: Int. J. Prod. Res. (2023)
Keyphrases
- semiconductor manufacturing
- probabilistic model
- high level
- cost function
- computational model
- experimental data
- mathematical model
- discrete event simulation
- real time
- decision theoretic
- quality control
- formal model
- conceptual model
- theoretical framework
- probability distribution
- special case
- objective function
- bayesian networks
- decision making
- data sets