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Simultaneous IC-internal voltage and current measurements via a multi lever Scanning Force Microscope.
Claus Hartmann
Rainer Weber
Wolfgang Mertin
Erich Kubalek
Anne-Dorothea Müller
Michael Hietschold
Published in:
Microelectron. Reliab. (2002)
Keyphrases
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short circuit
information systems
integrated circuit
low voltage
data sets
learning algorithm
image processing
image sequences
visual inspection
electric field