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Separation by Bonding Si Islands (SBSI) for Advanced CMOS LSI Applications.
Takashi Yamazaki
Shun'ichiro Ohmi
Shinya Morita
Hiroyuki Ohri
Junichi Murota
Masao Sakuraba
Hiroo Omi
Tetsushi Sakai
Published in:
IEICE Trans. Electron. (2005)
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