Joint modeling of classification and regression for improving faulty wafer detection in semiconductor manufacturing.
Seokho KangPublished in: J. Intell. Manuf. (2020)
Keyphrases
- numeric values
- semiconductor manufacturing
- discrete event simulation
- process control
- production system
- automatic detection
- detection method
- detection algorithm
- object detection
- classification method
- decision trees
- pattern classification
- support vector regression
- false alarms
- classification accuracy
- pattern recognition
- robust detection
- support vector