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A novel method to measure the internal pressure of MEMS thin-film packages.

B. WangJeroen De CosterMartine WeversIngrid De Wolf
Published in: Microelectron. Reliab. (2013)
Keyphrases
  • similarity measure
  • objective function
  • databases
  • data analysis
  • control system
  • significant improvement
  • knowledge discovery
  • support vector machine
  • clustering method
  • thin film