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Influence of Exposure Energy Control for High Voltage Pulsed Xenon Lamp on the Lithography Accuracy of Linear Grating.
Dongxu Ren
Zexiang Zhao
Bin Li
Wenhan Zeng
Published in:
ICAC (2019)
Keyphrases
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high voltage
normal operation
operating conditions
high accuracy
control system
computational cost
prediction accuracy
data mining
steady state
electron beam lithography
data sets
decision trees
classification accuracy
energy consumption
control strategy
partial discharge