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Study of PSO Optimized BP Neural Network and Smith Predictor for MOCVD Temperature Control in 7 nm 5G Chip Process.
Kuo-Chi Chang
Yu-Wen Zhou
Hsiao-Chuan Wang
Yuh-Chung Lin
Kai-Chun Chu
Tsui-Lien Hsu
Jeng-Shyang Pan
Published in:
AISI (2020)
Keyphrases
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bp neural network
temperature control
neural network
pid controller
smith predictor
particle swarm optimization
back propagation
control algorithm
fault diagnosis
artificial neural networks
neural network model
process control
real time
multi objective
rbf neural network
support vector
power plant
genetic algorithm