Progress of Binary-Collision-Approximation-Based Simulation for Surface Erosion by Plasma Irradiation.
Seiki SaitoMasayuki TokitaniHiroaki NakamuraPublished in: AsiaSim (2014)
Keyphrases
- collision detection
- scanning electron microscope
- numerical calculation
- subdivision scheme
- simulation model
- d objects
- three dimensional
- surface reconstruction
- normal vectors
- approximation error
- distance transform
- approximation algorithms
- high density
- thin film
- mathematical morphology
- numerical simulations
- mathematical model
- quasi static
- binary images
- virtual environment
- multiscale