Highly Reliable and Manufacturable MRAM embedded in 14nm FinFET node.
S. KoJ. H. ParkJ. H. BakH. JungJ. ShimD. S. KimW. LimD.-E. JeongJ. H. LeeK. LeeJ.-H. ParkY. KimC. KimJ. H. JeongC. Y. LeeS. H. HanY. JiS. H. HwangH. J. ShinK. LeeY. J. SongY. G. ShinJ. H. SongPublished in: VLSI Technology and Circuits (2023)