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Diagnosis Model of Radio Frequency Impedance Matching in Plasma Equipment by Using Neural Network and Wavelets.

Byungwhan KimJae Young ParkDonghwan KimSeung Soo Han
Published in: PRICAI (2006)
Keyphrases
  • neural network
  • neural network model
  • non stationary
  • vector quantization
  • closed loop
  • radio frequency