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Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography.
Michael Fahrbach
Min Xu
Wilson Ombati Nyang'au
Oleg Domanov
Christian H. Schwalb
Zhi Li
Christian Kuhlmann
Uwe Brand
Erwin Peiner
Published in:
Sensors (2023)
Keyphrases
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high speed
low power
camera calibration
single view
high speed networks
frame rate
real time
data sets
process control
database
multi agent systems
virtual environment