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Application of Data Mining for Improving Yield in Wafer Fabrication System.

Dong-Hyun BaekIn-Jae JeongChang Hee Han
Published in: ICCSA (4) (2005)
Keyphrases
  • application of data mining
  • wafer fabrication
  • web mining
  • web usage mining
  • data mining
  • website
  • knowledge discovery