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William C. Dunn, Introduction to Instrumentation, Sensor, and Process Control , Artech House, Boston (2005) ISBN 1-58053-011-7 332 pp., Hardcover, plus XIII.
Mile K. Stojcev
Published in:
Microelectron. Reliab. (2008)
Keyphrases
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process control
control system
sensor data
product quality
intelligent control
manufacturing process
semiconductor manufacturing
data acquisition
sensor networks
sensor fusion
multi sensor
databases
data sets
time of flight
website
information systems
search engine
sensor technology