An Electrostatic MEMS Roll-Pitch Rotation Rate Sensor with In-Plane Drive Mode.
Ahmed KhaledAhmed M. SalmanNawaf S. AljehaniIbrahim F. AlzahemRidha S. AlmikhlafiRadwan M. NoorYasser Mohammad SeddiqMajed S. Al-GhamdiMostafa SolimanMohamed A. E. MahmoudPublished in: Sensors (2022)